UDC 621.391.882

Mathematical models of thin-film resistor impedance with a size of 5 mm

V. G. Spirin

The main kinds of errors and their effect on the thin-film resistor impedance are discussed. The model of the resistor nominal impedance includes additionally the systematic errors of its length and width as well as the impedance of the electrodes. The application of the above models makes it possible to design thin-films resistors with the size of 50 µm and less without any change of the manufacturing process.

Russia, Arzamas, «Temp-Avia» SPO.