UDC 621.3.049.77.001

Evaluation of errors in thin-film component manufacturing

V. G. Spirin

The test circuit and computational algorithm for determining systematic/random errors of the thin-film resistor design values are developed. The experimental evaluation of the above errors is conducted. Formulas for size calculation of conductors and terminations pads are given.

Russia, Arzamas, «Temp-Avia» SPO.