UDC 621.3.049.77.001

Compensation for thin-film component systematic errors by mask elements

V. G. Spirin

Several methods of compensation for systematic errors of the thin-film resistor design values which defim the yield of effective micromodules are discussed. The compensation by means of changing dimensions of mask elements using certain algorithms is proposed that permits to reduce dimensions of all the thin-film components without reduction of the yield of effective micromodules.

Russia, Arzamas, «Temp-Avia» SPO.